Ursprungsort
Henan, China
Klassifikation
Heizungsmaschine des Labors
Maßgeschneiderte unterstützung
OEM
Modellnummer
OTF-1200X-III-R5-PECVD
Product name
Three -Zone PECVD Rotary Tube Furnace
Keywords
Three-Zone Rotary Furnace
Working temp
1200'C Max(<1hrs)., and 1100'C for continuous heating
Three heating zones
6"+ 12"+ 6", total 24" ( 609 mm)
Constant temperature zone
480 mm length +/-2'C
Output Power
5 -300W adjustable with ± 1% stability
RF frequency
13.56 MHz ±0.005% stability
Tube Rotation Speed
0 - 5 RPM variable
MFC Gas Mixing Station
Four precision mass flow meters
